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PVT-tolerant CMOS capacitive readour IC for MEMS accelerometers : MEMS 가속도 센서 응용을 위한 PVT 변화에 둔감한 CMOS 용량 감지 회로

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Authors

고형호

Advisor
조동일
Issue Date
2008
Publisher
서울대학교 대학원
Keywords
용량 감지Capacitive readout가속도계MicroaccelerometerPVT변화PVT variationsCMOS-MEMS 혼성집적CMOS-MEMS hybrid integration
Description
Thesis(doctors) --서울대학교 대학원 :전기. 컴퓨터공학부, 2008.8.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041615

https://hdl.handle.net/10371/46929
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