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Spectral reflectometry를 이용한 다층 박막의 두께 측정에 관한 연구 : Study on thickness measurement of multilayer thin film with spectral reflctometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박희재 | - |
| dc.contributor.author | 오경균 | - |
| dc.date.accessioned | 2010-02-01T11:02:11Z | - |
| dc.date.available | 2010-02-01T11:02:11Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045750 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/48171 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2007. | ko |
| dc.format.extent | vi, 30 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 두께 | ko |
| dc.subject | Thickness | ko |
| dc.subject | 다층 박막 | ko |
| dc.subject | Multilayer Thin film | ko |
| dc.subject | 분광 반사계 | ko |
| dc.subject | Spectral Reflectometry | ko |
| dc.subject | 반사율 | ko |
| dc.subject | Reflectance | ko |
| dc.subject | 표면 거칠기 | ko |
| dc.subject | Surface roughness Peak detection. | ko |
| dc.subject | Peak Detection | ko |
| dc.title | Spectral reflectometry를 이용한 다층 박막의 두께 측정에 관한 연구 | ko |
| dc.title.alternative | Study on thickness measurement of multilayer thin film with spectral reflctometry | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Master | ko |
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