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Fatigue-free behavior of highly oriented Bi3.25La0.75Ti3O12 thin films grown on Pt/Ti/SiO2/Si(100) by metal-organic solution decomposition
Cited 135 time in
Web of Science
Cited 136 time in Scopus
- Authors
- Issue Date
- 2001-01-29
- Publisher
- American Institute of Physics
- Citation
- Appl. Phys. Lett. 78, 658 (2001)
- Keywords
- BISMUTH TITANATE ; MEMORIES ; DEPOSITION
- Abstract
- Fatigue-free and highly c-axis oriented Bi3.25La0.75Ti3O12 (BLT) thin films were grown on Pt/Ti/SiO2/Si(100) substrates using metalorganic solution decomposition. Films annealed above 500 degreesC were characterized by strong c-axis preferential growth with an in-plane alignment of grains. The BLT film capacitors with a Pt top electrode showed excellent ferroelectric properties. The remanent polarization (2P(r)) and the coercive field (E-c) were in the range of 26-28 muC/cm(2) and 50-75 kV/cm, respectively. More importantly, the BLT capacitors did not show any significant fatigue up to 3.5x10(10) read/write switching cycles at a frequency of 1 MHz. (C) 2001 American Institute of Physics.
- ISSN
- 0003-6951 (print)
1077-3118 (online)
- Language
- English
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