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질소축적 측벽 산화막을 적용한 shallow trench isolation (STI)에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박병국 | - |
| dc.contributor.author | 이명원 | - |
| dc.date.accessioned | 2010-02-02T07:09:27Z | - |
| dc.date.available | 2010-02-02T07:09:27Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059927 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/48356 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2003. | ko |
| dc.format.extent | ii, 66 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | shallow trench isolation (STI) | ko |
| dc.subject | Shallow trench isolation (sti) | ko |
| dc.subject | mechanical stress | ko |
| dc.subject | Mechanical stress | ko |
| dc.subject | nitrogen pile-up oxidation | ko |
| dc.subject | Initial o2 injection method | ko |
| dc.subject | reverse junction leakage | ko |
| dc.subject | Reverse junction leakage | ko |
| dc.subject | temperature | ko |
| dc.subject | Temperature | ko |
| dc.subject | deep level transient spectroscopy (DLTS) | ko |
| dc.subject | Deep level transient spectroscopy (dlts) | ko |
| dc.subject | hot carreir reliability | ko |
| dc.subject | Hot carrier reliability | ko |
| dc.title | 질소축적 측벽 산화막을 적용한 shallow trench isolation (STI)에 관한 연구 | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Master | ko |
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