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Nanocrystalline silicon thin film transistors fabricated employing inductively coupled plasma chemical vapor deposition system : 誘導 結合 플라즈마 化學 氣象 蒸着 시스템을 利用하여 製作한 微細結晶 실리콘 薄膜 트랜지스터에 關한 硏究
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한민구 | - |
| dc.contributor.author | 한상면 | - |
| dc.date.accessioned | 2010-02-02T08:24:10Z | - |
| dc.date.available | 2010-02-02T08:24:10Z | - |
| dc.date.copyright | 2008. | - |
| dc.date.issued | 2008 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039579 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/48459 | - |
| dc.description | Thesis(doctors) --서울대학교 대학원 :전기. 컴퓨터공학부, 2008.2. | ko |
| dc.format.extent | xv, 219 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 미세 결정 실리콘 박막 트랜지스터 (nc-Si TFT) | ko |
| dc.subject | nanocrystalline silicon thin film transistor (nc-Si TFT) | ko |
| dc.subject | 미세 결정 실리콘 박막 (nc-Si thin film) | ko |
| dc.subject | nanocrystalline silicon film | ko |
| dc.subject | 유도 결합 플라즈마 화학 기상 증착 시스템 (ICP-CVD) | ko |
| dc.subject | inductively coupled plasma chemical vapor deposition (ICP-CVD) | ko |
| dc.title | Nanocrystalline silicon thin film transistors fabricated employing inductively coupled plasma chemical vapor deposition system | ko |
| dc.title.alternative | 誘導 結合 플라즈마 化學 氣象 蒸着 시스템을 利用하여 製作한 微細結晶 실리콘 薄膜 트랜지스터에 關한 硏究 | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Doctor | ko |
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