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A compensation pattern for anti-footing in MEMS fabrication : MEMS 식각공정의 footing 현상방지를 위한 보상패턴에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 전국진 | - |
| dc.contributor.author | 김정헌 | - |
| dc.date.accessioned | 2010-02-02T09:07:20Z | - |
| dc.date.available | 2010-02-02T09:07:20Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058011 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/48577 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :전기· 컴퓨터공학부,2003. | en |
| dc.format.extent | 39 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | footing 현상 | en |
| dc.subject | RIE lag 현상 | en |
| dc.subject | 보상패턴 | en |
| dc.subject | DRIE | en |
| dc.subject | 에치홀 | en |
| dc.title | A compensation pattern for anti-footing in MEMS fabrication | en |
| dc.title.alternative | MEMS 식각공정의 footing 현상방지를 위한 보상패턴에 관한 연구 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 전기· 컴퓨터공학부 | - |
| dc.description.degree | Master | en |
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