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A study on the sourcedrain junction defect of eximer laser annealed polycrystaline thin film transistor : 다결정 실리콘 박막 트랜지스터의 소오스드레인 접합부 결함에 대한 연구
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- Authors
- Advisor
- 한민구
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 다결정 실리콘 ; Polycrystalline silicon ; 박막 트랜지스터 ; Thin film transistor ; ELA ; Ela ; Ion implantation ; Damage ; Diffraction
- Description
- Thesis (master`s)--서울대학교 대학원 :전기· 컴퓨터공학부,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057467
https://hdl.handle.net/10371/48583
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