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실리콘·유리 접합기판을 이용한 단결정 실리콘 빗모양 액추에이터의 노칭 및 에칭홀 제거 공정과 응용에 관한 연구 : (A)Study on developments and applications of novel notch-free and etch-hole-free processes on SiOG substrate for single crystak silicon comb actuator
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김용권 | - |
| dc.contributor.author | 김재흥 | - |
| dc.date.accessioned | 2010-02-02T16:05:54Z | - |
| dc.date.available | 2010-02-02T16:05:54Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059858 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/48869 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :전기. 컴퓨터공학부,2003. | ko |
| dc.format.extent | xv, 233 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | SiOG | ko |
| dc.subject | Silicon on glass(siog) | ko |
| dc.subject | 고형상비 | ko |
| dc.subject | High-aspect-ratio | ko |
| dc.subject | 단결정 실리콘 빗모양 액추에이터 | ko |
| dc.subject | Single crystal silicon comb actuator | ko |
| dc.subject | 노칭 현상 | ko |
| dc.subject | Notching phenomenon | ko |
| dc.subject | 자동정렬 | ko |
| dc.subject | Self-aligning | ko |
| dc.subject | 금속막 중간층 | ko |
| dc.subject | Metal interlayer | ko |
| dc.subject | 가변 광 감쇠기 | ko |
| dc.subject | Variable optical attenuator(voa) | ko |
| dc.subject | 에칭홀 | ko |
| dc.subject | Ucarp | ko |
| dc.subject | 미세 유체 채널 | ko |
| dc.subject | Scanning mirror | ko |
| dc.subject | uCARP | ko |
| dc.subject | Spm | ko |
| dc.subject | 스캐닝 미러 | ko |
| dc.subject | Platform actuator | ko |
| dc.subject | SPM | ko |
| dc.subject | Xy stage | ko |
| dc.subject | 플랫폼 액추에이터 | ko |
| dc.subject | XY 스테이지 | ko |
| dc.title | 실리콘·유리 접합기판을 이용한 단결정 실리콘 빗모양 액추에이터의 노칭 및 에칭홀 제거 공정과 응용에 관한 연구 | ko |
| dc.title.alternative | (A)Study on developments and applications of novel notch-free and etch-hole-free processes on SiOG substrate for single crystak silicon comb actuator | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Doctor | ko |
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