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(A)Laterally robust MEMS probe card for fine pitch test using a new cantilever moving scheme
새로운 외팔보 동작 형태를 이용한 미세피치 측정을 위한 강건한 초소형 프로브 카드

DC Field Value Language
dc.contributor.advisor전국진-
dc.contributor.author김봉환-
dc.date.accessioned2010-02-02T16:07:31Z-
dc.date.available2010-02-02T16:07:31Z-
dc.date.copyright2005.-
dc.date.issued2005-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050113eng
dc.identifier.urihttps://hdl.handle.net/10371/48900-
dc.descriptionThesis(doctoral)--서울대학교 대학원 :전기컴퓨터공학부,2005.en
dc.format.extentvii, 111 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject멤즈 프로브 카드en
dc.subjectMEMS probe carden
dc.subject접촉저항en
dc.subjectcontact resistanceen
dc.subject접촉힘en
dc.subjectcontact forceen
dc.subject누설전류en
dc.subjectwearen
dc.subject평탄도en
dc.title(A)Laterally robust MEMS probe card for fine pitch test using a new cantilever moving schemeen
dc.title.alternative새로운 외팔보 동작 형태를 이용한 미세피치 측정을 위한 강건한 초소형 프로브 카드en
dc.typeThesis-
dc.contributor.department전기컴퓨터공학부-
dc.description.degreeDoctoren
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Ph.D. / Sc.D._전기·정보공학부)
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