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유기금속 화학증착법으로 제조된 고유전율 박막용 Pt 및 RuO₂전국의 특성분석 : Characterization of Pt and RuO₂electrodes for high dielectric thin films prepared by metallorganic chemical vapor deposition

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dc.contributor.advisor김형준-
dc.contributor.author이종명-
dc.date.accessioned2010-02-05T06:39:18Z-
dc.date.available2010-02-05T06:39:18Z-
dc.date.copyright1998.-
dc.date.issued1998-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076533kog
dc.identifier.urihttps://hdl.handle.net/10371/50773-
dc.description학위논문(박사)--서울대학교 대학원 :무기재료공학과,1998.ko
dc.format.extentxii, 177 p.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject(Ba,Sr)TiO3ko
dc.subjectthin filmko
dc.subject박막ko
dc.subjectmetallorganic chemical vapor depositionko
dc.subjectPtko
dc.subjectelectrodeko
dc.subjectRuO2ko
dc.subject유기금속 화학증착법ko
dc.title유기금속 화학증착법으로 제조된 고유전율 박막용 Pt 및 RuO₂전국의 특성분석ko
dc.title.alternativeCharacterization of Pt and RuO₂electrodes for high dielectric thin films prepared by metallorganic chemical vapor depositionko
dc.typeThesis-
dc.contributor.department무기재료공학과-
dc.description.degreeDoctorko
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