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유기금속 화학증착법으로 제조된 고유전율 박막용 Pt 및 RuO₂전국의 특성분석 : Characterization of Pt and RuO₂electrodes for high dielectric thin films prepared by metallorganic chemical vapor deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김형준 | - |
dc.contributor.author | 이종명 | - |
dc.date.accessioned | 2010-02-05T06:39:18Z | - |
dc.date.available | 2010-02-05T06:39:18Z | - |
dc.date.copyright | 1998. | - |
dc.date.issued | 1998 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076533 | kog |
dc.identifier.uri | https://hdl.handle.net/10371/50773 | - |
dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1998. | ko |
dc.format.extent | xii, 177 p. | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | (Ba,Sr)TiO3 | ko |
dc.subject | thin film | ko |
dc.subject | 박막 | ko |
dc.subject | metallorganic chemical vapor deposition | ko |
dc.subject | Pt | ko |
dc.subject | electrode | ko |
dc.subject | RuO2 | ko |
dc.subject | 유기금속 화학증착법 | ko |
dc.title | 유기금속 화학증착법으로 제조된 고유전율 박막용 Pt 및 RuO₂전국의 특성분석 | ko |
dc.title.alternative | Characterization of Pt and RuO₂electrodes for high dielectric thin films prepared by metallorganic chemical vapor deposition | ko |
dc.type | Thesis | - |
dc.contributor.department | 무기재료공학과 | - |
dc.description.degree | Doctor | ko |
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