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열산화법으로 형성된 N₂O 게이트 산화막의 전기적 특성 및 MOSFET 응용 연구 : Electrical characterization of the furanace-grown N₂O gate oxide and its application for MOSFETs

DC Field Value Language
dc.contributor.advisor김형준-
dc.contributor.author김선우-
dc.date.accessioned2010-02-05T06:40:50Z-
dc.date.available2010-02-05T06:40:50Z-
dc.date.copyright1996.-
dc.date.issued1996-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081613kog
dc.identifier.urihttps://hdl.handle.net/10371/50804-
dc.description학위논문(박사)--서울대학교 대학원 :무기재료공학과,1996.ko
dc.format.extentxii 162 p.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject열산화막ko
dc.subjectthermal oxideko
dc.subject게이트 산화막ko
dc.subjectgate oxideko
dc.subject신뢰성ko
dc.subjectreliabilityko
dc.subject표면채널형 MOSFETko
dc.subjectsurface-channel MOSFETko
dc.subjectMOS 커패시터ko
dc.subjectMOS capacitorko
dc.title열산화법으로 형성된 N₂O 게이트 산화막의 전기적 특성 및 MOSFET 응용 연구ko
dc.title.alternativeElectrical characterization of the furanace-grown N₂O gate oxide and its application for MOSFETsko
dc.typeThesis-
dc.contributor.department무기재료공학과-
dc.description.degreeDoctorko
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