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Deposition and solid phase crystallization of a-Si Ge films and application to thin film transistor : 비정질 Si Ge 합금 박막의 증착 및 이의 고상 결정화 거동과 박막 트랜지스터에의 응용
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- Authors
- Advisor
- 김상주
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Keywords
- solid phase crystallization ; thin film transistor ; low pressure chemical vapor deposition ; Si₂H? ; GeH₄
- Description
- Thesis (doctoral)--서울대학교 대학원 :금속공학과 재료공학전공,1996.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082186
https://hdl.handle.net/10371/50821
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