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플라즈마 화학 증착법에 의해 제조된 (Ti₁-xA1x)N 박막의 특성에 관한 연구 : Properties of the (Ti₁-xA1x)N coatings deposited by plasma enhanced chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정중 | - |
| dc.contributor.author | 김병준 | - |
| dc.date.accessioned | 2010-02-05T06:43:01Z | - |
| dc.date.available | 2010-02-05T06:43:01Z | - |
| dc.date.copyright | 1998. | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000074773 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50846 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1998. | ko |
| dc.format.extent | x, 123 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 플라즈마 화학기상증착 | ko |
| dc.subject | a(Ti,Al)N | ko |
| dc.subject | 플라즈마 전처리 | ko |
| dc.subject | plasma enhanced chemical vapor deposition(PECVD) | ko |
| dc.subject | 농도경사피막 | ko |
| dc.subject | plasma pre-treatment | ko |
| dc.subject | 접착력 | ko |
| dc.subject | compositionally gradient coating | ko |
| dc.subject | 피막산화특성 | ko |
| dc.subject | adhesion strength | ko |
| dc.title | 플라즈마 화학 증착법에 의해 제조된 (Ti₁-xA1x)N 박막의 특성에 관한 연구 | ko |
| dc.title.alternative | Properties of the (Ti₁-xA1x)N coatings deposited by plasma enhanced chemical vapor deposition | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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