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이온플레이팅법으로 제조된 (Ti,Al)N박막의 미세구조 및 특성에 관한 연구 : Microstructures and properties of (Ti,Al)N thin film prepared by ion plating
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- Authors
- Advisor
- 이정중
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- 이온플레이팅 ; (Ti,Al)N ; 미세조직 ; ion plating ; Al함량 ; microstructure ; 농도경사 ; residual stress ; 접착력 ; adhesion
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079632
https://hdl.handle.net/10371/50850
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