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웨이퍼 단위로 실장된 단결정 실리콘 SP9T RF MEMS 스위치에 관한 연구 : (A)Study on wafer-level packaged single crystalline silicon single-pole nine-throw RF MEMS switch
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김용권 | - |
| dc.contributor.author | 김종만 | - |
| dc.date.accessioned | 2010-02-08T04:51:26Z | - |
| dc.date.available | 2010-02-08T04:51:26Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045198 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/51593 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2007. | ko |
| dc.format.extent | xv, 197 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | SP9T RF MEMS 스위치 | ko |
| dc.subject | SP9T RF MEMS switch | ko |
| dc.subject | 단결정 실리콘 | ko |
| dc.subject | single crystalline silicon | ko |
| dc.subject | 구조물 변형 | ko |
| dc.subject | structural deformation | ko |
| dc.subject | 저전압 구동 | ko |
| dc.subject | low voltage actuation | ko |
| dc.subject | 균일성 | ko |
| dc.subject | uniformity | ko |
| dc.subject | 웨이퍼 단위 실장 | ko |
| dc.subject | wafer-level packaging | ko |
| dc.title | 웨이퍼 단위로 실장된 단결정 실리콘 SP9T RF MEMS 스위치에 관한 연구 | ko |
| dc.title.alternative | (A)Study on wafer-level packaged single crystalline silicon single-pole nine-throw RF MEMS switch | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | ko |
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