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Multiwafer LPCVD에 대한 박막 증착 모델링
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 최만수 | - |
| dc.contributor.author | 허종태 | - |
| dc.date.accessioned | 2010-02-08T05:46:04Z | - |
| dc.date.available | 2010-02-08T05:46:04Z | - |
| dc.date.copyright | 1996. | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000080889 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/51755 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :기계공학과,1996. | ko |
| dc.format.extent | ix, 54 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.title | Multiwafer LPCVD에 대한 박막 증착 모델링 | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계공학과 | - |
| dc.description.degree | Master | ko |
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