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실리콘계 박막제조 공정에서 열 및 물질전달과 입자역학에 관한 연구 : Studies of heat, mass transfer and particle dynamics during silicon-based thin film fabrication processes
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- Authors
- Advisor
- 최만수
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- 화학증착공정 ; chemical vapor deposition ; 수정된 화학증착공정 ; modified chemical vapor deposition ; 저압화학증착공정 ; low pressure chemical vapor deposition ; 입자역학방정식 ; general dynamic equation ; 구간해석방법 ; sectional method
- Description
- 학위논문(박사)--서울대학교 대학원 :기계공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079638
https://hdl.handle.net/10371/51868
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