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PECVD법으로 형성된 (Ti₁-xAlx)N 박막의 열처리 및 고온산화에 관한 연구

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Authors

김형환

Advisor
이정중
Issue Date
1995
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과,1995.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000083583

https://hdl.handle.net/10371/51987
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