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PECVD법으로 형성된 (Ti₁-xAlx)N 박막의 열처리 및 고온산화에 관한 연구
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- Authors
- Advisor
- 이정중
- Issue Date
- 1995
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :금속공학과,1995.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000083583
https://hdl.handle.net/10371/51987
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