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아르곤산소 혼합기체를 이용한 DC 마그네트론 스퍼터링으로 증착된 백금박막에 미치는 산소의 영향

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Authors
박태순
Advisor
윤의준
Issue Date
1997
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :무기재료공학과,1997.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000078838

https://hdl.handle.net/10371/52044
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
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