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Cu 배선공정을 위한 MOCVD-TaN 확산방지막의 개발
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- Authors
- Advisor
- 이정중
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :금속공학과 재료공학전공,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000078605
https://hdl.handle.net/10371/52240
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