Publications
Detailed Information
The deposition characteristics of TaCN films deposited by MOCVD (metallorganic chemical vapor deposition) : 유기금속화학증착 법으로 증착한 TaCN 박막의 증착특성
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김기범 | - |
| dc.contributor.author | 전규창 | - |
| dc.date.accessioned | 2010-02-08T07:52:27Z | - |
| dc.date.available | 2010-02-08T07:52:27Z | - |
| dc.date.copyright | 1996. | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082012 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/52244 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :금속공학과 재료공학전공,1996. | en |
| dc.format.extent | v, 37 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.title | The deposition characteristics of TaCN films deposited by MOCVD (metallorganic chemical vapor deposition) | en |
| dc.title.alternative | 유기금속화학증착 법으로 증착한 TaCN 박막의 증착특성 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 재료공학전공 | - |
| dc.description.degree | Master | en |
- Appears in Collections:
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.