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ICPCVD SiNx passivation을 이용한 GaAs metamorphic HEMT 소자의 DC 특성 개선에 관한 연구 : (A)study on the DC characteristics improvement of GaAs metamorphic HEMTs using ICPCVD SiNx passivation
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 서광석 | - |
dc.contributor.author | 김동환 | - |
dc.date.accessioned | 2010-02-09 | - |
dc.date.available | 2010-02-09 | - |
dc.date.copyright | 2007. | - |
dc.date.issued | 2007 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043858 | kog |
dc.identifier.uri | https://hdl.handle.net/10371/52482 | - |
dc.description | 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2007. | ko |
dc.format.extent | 55 장 | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | Metamorphic HEMT | ko |
dc.subject | remote ICPCVD | ko |
dc.subject | conformal | ko |
dc.subject | DPL | ko |
dc.subject | cutoff frequency(fT) | ko |
dc.subject | maximum oscillation frequency(fmax) | ko |
dc.title | ICPCVD SiNx passivation을 이용한 GaAs metamorphic HEMT 소자의 DC 특성 개선에 관한 연구 | ko |
dc.title.alternative | (A)study on the DC characteristics improvement of GaAs metamorphic HEMTs using ICPCVD SiNx passivation | ko |
dc.type | Thesis | - |
dc.contributor.department | 전기. 컴퓨터공학부 | - |
dc.description.degree | Master | ko |
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