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셀프테스트 가능한 용량형 가속도센서의 SPICE 모델링 : Modeling of self-testable capacitive MEMS accelerometer using SPICE
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- Authors
- Advisor
- 조동일
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS ; MEMS ; 가속도센서 ; Accelerometer ; 셀프테스트 ; Self-test ; 모델링 ; Modeling ; 시뮬레이션 ; Simulation ; 측정 ; Measurement
- Description
- 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045799
https://hdl.handle.net/10371/53524
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