S-Space College of Natural Sciences (자연과학대학) Dept. of Physics and Astronomy (물리·천문학부) Physics (물리학전공) Journal Papers (저널논문_물리학전공)
Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate
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- Issue Date
- 한국물리학회 = The Korean Physical Society
- J. Korean Phys. Soc. 44, 129 (2004)
- ZnO ; Dielectric function ; Ellipsometry ; Critical point ; Holden model
- We grew ZnO and Zn1-xMgxO thin films on (0001) sapphire substrates by using metal-organic vapor phase epitaxy and measured the pseudo-dielectric functions using variable-angle spectroscopic ellipsometry. We analyzed the pseudo-dielectric functions by using the multi-layer model. The dielectric functions were fitted by using a Holden model dielectric function. We used anisotropic layer modeling for the ZnO thin film, whereas we adopted the approximation of isotropic layer modeling for the Zn1-xMgxO alloys. We also discuss the Mg composition dependence of the bandgap and the binding energy in Zn1-xMgxO alloys, and consider the valence-band ordering in ZnO thin films.
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