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Dopant effects in solid phase epitaxial growth of silicon : 실리콘의 고체상 단결정 성장속도에서의 dopant 효과
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이홍희 | - |
| dc.contributor.author | 김연상 | - |
| dc.date.accessioned | 2010-03-09T07:12:34Z | - |
| dc.date.available | 2010-03-09T07:12:34Z | - |
| dc.date.copyright | 1997. | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000077107 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/58996 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :화학공학과,1997. | en |
| dc.format.extent | v, 22 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.title | Dopant effects in solid phase epitaxial growth of silicon | en |
| dc.title.alternative | 실리콘의 고체상 단결정 성장속도에서의 dopant 효과 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 화학공학과 | - |
| dc.description.degree | Master | en |
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