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Extrinsic and intrinsic phase boundary for low temperature silicon chemical vapor deposition : 저온 실리콘 화학 증착에서 막 구조의 경계 조건
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- Authors
- Advisor
- 이홍희
- Issue Date
- 1995
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :화학공학과,1995.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000085531
https://hdl.handle.net/10371/59012
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