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플라즈마를 이용한 비정질탄소 박막의 질소 도핑 및 전계방출형 디스플레이를 위한 음극 재료로서의 응용에 관한 연구 : A Study of the nitrogen doping in the amorphous carbon thin films by plasma deposition method and its application to cold cathode material for FED

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Authors

김용철

Advisor
주승기
Issue Date
2000
Publisher
서울대학교 대학원
Keywords
비정질탄소Amorphous carbon플라즈마 화학증착법plasma chemical vapor deposition스퍼터링sputteringFT-IRRaman
Description
학위논문(박사)--서울대학교 대학원 :공업화학과,2000.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000069486

https://hdl.handle.net/10371/59516
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