S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Mechanical Aerospace Engineering (기계항공공학부) Journal Papers (저널논문_기계항공공학부)
Capillary Force Lithography
- Suh, Kahp Y.; Kim, Yun S.; Lee, Hong H.
- Issue Date
- John Wiley & Sons
- Adv. Mater. 2001, 13, 1386
- A simple yet robust method for large-area patterning of polymer films - capillary force lithography - is presented here. This method, which combines the essential features of imprint lithography and microcontact printing, allows the replication of features down to 100 nm. The Figure shows a typical pattern.
- 0935-9648 (print)
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