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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Mechanical Aerospace Engineering (기계항공공학부)
Theses (Ph.D. / Sc.D._기계항공공학부)
Control over interface properties for fabricating nanopatterns in contact-based nanolithographic processes
접촉방식의 나노리소그래피에서 나노구조 제작을 위한 계면 성질 제어연구
- Authors
- 김재관
- Advisor
- 서갑양
- Issue Date
- 2010
- Publisher
- 서울대학교 대학원
- Keywords
- nanotechnology; 나노공정; nanopattern; 나노 패턴; detachment lithography; 박리 공정; work of adhesion; 나노임프린트; nanoimprint; 고분자 몰드; AFM; 접착력; pull-off force and polymer mold; 원자 현미경
- Description
- Thesis(doctors) --서울대학교 대학원 :기계항공공학부,2010.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000032499
https://hdl.handle.net/10371/63898
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