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유기 금속 화합 증착법을 이용한 Zinc tin oxide(ZTO) 산화물 반도체의 성장 및 특성평가와 이를 적용한 박막 트랜지스터의 동작 특성 연구 : Study of growth and characterization of Zinc tin oxide semiconducting film using metal organic chemical vapor deposition and its application to the thin film transistor

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Authors

오힘찬

Advisor
황철성
Issue Date
2010
Publisher
서울대학교 대학원
Keywords
박막Thin film transistor트랜지스터TFT박막트랜지스터Chemical vapor deposition유기금속CVD화학증착Zinc tin oxide산화물 반도체ZTO
Description
학위논문(석사) --서울대학교 대학원 :재료공학부,2010.2.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033304

https://hdl.handle.net/10371/64793
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