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실리콘 화학 기상 증착 중 생성되는 하전된 입자의 거동에 필라멘트 주변에 생성되는 전기장이 미치는 영향
Effect of Electric Field around Hot Wires on Deposition Behavior of Charge Carriers during Hot-Wire Chemical Vapor Deposition of Silicon

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  • mendeley

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