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Molecular Dynamics Analysis of Force Exerted on Stamp during a Thermal Nano Imprint Lithography : 나노 임프린트 리소그래피 공정 중 스탬프에 작용하는 힘의 분자동역학 해석
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이우일 | - |
| dc.contributor.author | 이희정 | - |
| dc.date.accessioned | 2010-05-10T03:48:10Z | - |
| dc.date.available | 2010-05-10T03:48:10Z | - |
| dc.date.copyright | 2010 | - |
| dc.date.issued | 2010 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033379 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/64845 | - |
| dc.description | Thesis(masters) --서울대학교 대학원 :기계항공공학부,2010.2. | en |
| dc.format.extent | viii, 35 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 나노 임프린트 리소그래피 | en |
| dc.subject | nano imprint lithography (NIL) | en |
| dc.subject | 분자동역학 | en |
| dc.subject | molecular dynamics (MD) | en |
| dc.subject | 힘 | en |
| dc.subject | force | en |
| dc.title | Molecular Dynamics Analysis of Force Exerted on Stamp during a Thermal Nano Imprint Lithography | en |
| dc.title.alternative | 나노 임프린트 리소그래피 공정 중 스탬프에 작용하는 힘의 분자동역학 해석 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Master | en |
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