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전자주사현미경에서 비점수차 보정에 관한 연구 : Auto astigmatism correction method in the scanning electron microscopy
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박희재 | - |
| dc.contributor.author | 안재형 | - |
| dc.date.accessioned | 2010-05-10T03:49:05Z | - |
| dc.date.available | 2010-05-10T03:49:05Z | - |
| dc.date.copyright | 2010 | - |
| dc.date.issued | 2010 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033364 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/64860 | - |
| dc.description | 학위논문(석사) --서울대학교 대학원 :기계항공공학부,2010.2. | ko |
| dc.format.extent | iii, 21장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 비점수차 | ko |
| dc.subject | stigmator | ko |
| dc.subject | 전자주사현미경 | ko |
| dc.subject | SEM | ko |
| dc.subject | astigmatism correction | ko |
| dc.title | 전자주사현미경에서 비점수차 보정에 관한 연구 | ko |
| dc.title.alternative | Auto astigmatism correction method in the scanning electron microscopy | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Master | ko |
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