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레이저 유기 형광법을 이용한 자기장이 인가된 유도결합형 플라즈마의 전계 측정에 관한 연구 : A Study on the Measurement of Electric Field in Sheath of the Magnetized Inductively Coupled Plasma using Laser-Induced Fluorescence

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dc.contributor.advisor황기웅-
dc.contributor.author송재현-
dc.date.accessioned2010-05-10T09:57:38Z-
dc.date.available2010-05-10T09:57:38Z-
dc.date.copyright2010-
dc.date.issued2010-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033413kog
dc.identifier.urihttps://hdl.handle.net/10371/65227-
dc.description학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2010.2.ko
dc.format.extentⅸ, 64 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject레이저 유기 형광법ko
dc.subjectLaser Induced Fluorescenceko
dc.subjectMICPko
dc.subjectMICPko
dc.subject쉬스ko
dc.subjectSheathko
dc.subject전계 측정ko
dc.subjectElectric Field Measurementko
dc.subjectLaser Induced Fluorescenceko
dc.subjectStark effectko
dc.subjectStark effectko
dc.title레이저 유기 형광법을 이용한 자기장이 인가된 유도결합형 플라즈마의 전계 측정에 관한 연구ko
dc.title.alternativeA Study on the Measurement of Electric Field in Sheath of the Magnetized Inductively Coupled Plasma using Laser-Induced Fluorescenceko
dc.typeThesis-
dc.contributor.department전기. 컴퓨터공학부-
dc.description.degreeMasterko
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