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Synthesis and characterization of Poly(ethyleneoxide)s and Poly(methyhydrolsiloxane)s derivatives for extreme-UV lithography application
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- Authors
- Advisor
- 이종찬
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- EUV 리소그라피 ; Euv lithography ; 폴리실세스퀴녹세인 ; Poss containing polymer ; 양이온 중합 ; Cationic polymerization ; 개환 중합 ; Hydrosilylation ; 하이드로 실릴레이션 ; High transparency and sensitivity ; 높은 투과도와 감도 ; 식각 저항성
- Description
- Thesis (master`s)--서울대학교 대학원 :응용화학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055609
https://hdl.handle.net/10371/66374
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