Thermal plasma flow and equivalent circuit analyses on the electrical coupling of a DC-RF hybrid plasma torch

Abstract

Numerical analyses on the electrical coupling of a DC-RF (direct current – radio frequency) hybrid plasma torch are conducted on the basis of magneto-hydrodynamic flow and equivalent circuit models to find the dependency of coupling efficiency on RF frequency and confinement tube radius. Computations are also carried out for the inductively coupled RF plasma torch to make a comparison between their calculated results. Numerical results reveal that the electrical coupling efficiencies of the RF and DC-RF hybrid plasma torches have a similar dependency on RF frequency with an almost constant difference of slightly higher efficiencies for the hybrid plasma, due to the relatively linear frequency dependency of equivalent circuit parameters as well as the resultant radially expanded DC-RF hybrid plasma toward the confinement tube wall compared with the RF plasma. But it is found that the reduction in the confinement tube radius less than some critical value, for instance 22 mm in this numerical work, possibly causes the coupling efficiency of the hybrid plasma to drastically deteriorate compared with that of the RF plasma. Such poor efficiency of the hybrid torch with relatively small radius is attributed to a significant diminution of the high temperature region upstream between the DC torch exit and the first induction coil segment, which means that the reduced tube radius may lead to an ineffective superposition of DC arc jet and RF plasma. As a result of the reduced high temperature region, the magnetic flux linkage is decreased for the smaller confinement tube, which leads to a drastic decrease in the electrical coupling. As the confinement tube radius becomes smaller, the re-circulation eddies under the DC torch are almost destroyed by a DC arc jet and a stagnation region formed is contracted to the central region. This contracted stagnation region prohibits the convection heat transfer by re-circulation of sheath gas flow from the coil zone to the upper part of the confinement tube, which ultimately results in a significant diminution of the high temperature region in the upstream. The present numerical analyses indicate that a special focus need to be brought into the influences of the DC arc jet on the electrical and thermal flow characteristics of the DC-RF hybrid plasma in determining the torch dimensions for effective conversion of RF power into plasma.