Fabrication of Monolithic Bridge Structures by Vacuum-Assisted Capillary-Force Lithography

Abstract

Bridging the gap: Vacuum-assisted capillary force lithography (CFL) allows the fabrication of monolithic, suspended bridge structures (see picture) by exploiting partial curing kinetics and vacuum-assisted hydraulic filling. A small portion of the base microstructure (<4 µm) is molded to create a bridge structure by simply applying a nanoscale mold with the impression of channels, meshes, or circles.