Soft lithography for microfluidics: a review

Abstract

Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasis on integrated microfluidic systems containing physical microstructures or a topographically patterned substrate. Relevant exemplary works based on the combination of various soft lithographic methods using microfluidics are introduced with some comments on their merits and weaknesses.