Kim, Moon-Jo; Yoon, Sangmoon; Park, Siwook; Jeong, Hye-Jin; Park, Ju-Won; Kim, Kuntae; Jo, Janghyun; Heo, Taehoon; Hong, Sung-Tae; Cho, Seung Hyun; Kwon, Young-Kyun; Choi, In Suk; Kim, Miyoung; Han, Heung Nam
Applied Materials Today, Vol.21, p. 100874