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Degradation analysis of MEMS device under cyclic loading for reliability-aided design : 신뢰성 기반 설계를 위한 MEMS 소자의 반복구동에 따른 열화 해석
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- Authors
- Advisor
- 권동일
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS ; microelectromechanical systems (MEMS) ; 신뢰성 ; reliability ; 열화 ; degradation ; 반복구동 ; cyclic loading ; 고장물리 ; physics-of-failure ; 신뢰성통계 ; reliability statistics ; 실리콘 ; silicon ; 니켈 ; nickel
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052252
https://hdl.handle.net/10371/12696
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