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열 필라멘트 법에 의한 박막 증착에서의 바이어스 효과 : Effects of the electric bias on the deposition of films by hot-wire chemical vapor deposition
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- Authors
- Advisor
- 황농문
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 바이어스 효과 ; Bias Effects ; 기판 바이어스 ; Substrate Bias ; 열 필라멘트법 ; Hot-wire CVD ; 하전된 나노입자 ; Charged nanoparticles ; 실리콘 박막 ; Silicon Thin Film ; 박막 태양전지. ; Thin Film Solar Cells
- Description
- Thesis(doctors) --서울대학교 대학원 :재료공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041539
https://hdl.handle.net/10371/13509
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