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Showing results 1 to 5 of 5
Issue Date
Title / Author(s) / Citation
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2004
Preparation of the thin films by inductively coupled plasma assisted chemical vapor deposition and diagnostics of inductively coupled plasma
이동각
link
2006
유도결합 플라즈마를 이용한 플라스틱 기판 상의 투명전도성 ZnO:Al 박막 증착 공정 연구
정승재
link
2007
(The)nanostructure and the properties of superhard TaN thins films deposited by plasma-assisted sputtering
이기락
link
2007
저온?고속증착을 위해 고안된 스퍼터링 공정 및 제조된 광촉매성 TiO₂ 박막의 특성 연구
한영훈
link
2014-02
Microstructure control of silicon thin films through controlling charged nanoparticles generated during hot wire chemical vapor deposition
이상훈
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1