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백색광 주사 간섭계에서의 HCF를 이용한 박막두께 측정 : Study on thin-film thickness measurement using HCF in white-light phase shifting Interferometry
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- Authors
- Advisor
- 박희재
- Major
- 기계항공공학부
- Issue Date
- 2011-08
- Publisher
- 서울대학교 대학원
- Keywords
- 투명박막 ; 박막 두께 ; 백생광 위상 천이 간섭계 ; 푸리에변환 ; HCF ; Transparent thin film ; Film Thickness ; White light phase shifting interferometry ; Fourier Transform
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 기계항공공학부, 2011.8. 박희재.
- Language
- kor
- URI
- https://hdl.handle.net/10371/157396
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031640
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