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Multi-Layer Nanoelectromechanical (NEM) Memory Switches for Multi-Path Routing
Cited 5 time in
Web of Science
Cited 4 time in Scopus
- Authors
- Issue Date
- 2022-01
- Citation
- IEEE Electron Device Letters, Vol.43 No.1, pp.162-165
- Abstract
- Monolithic three-dimensional (M3D) multilayer nanoelectromechanical (NEM) memory switches are experimentally demonstrated for reconfigurable multi-path routing. The multi-layer NEM memory switch has moving mechanical beams in different metal layers which operate independently in a nonvolatile manner, including high impedance states. For example, double-layer NEM memory switches implement nine different memory states. It is predicted that our proposed n-layer NEM memory switches utilizing n metal layers will exhibit 3((n-1)) x higher routing flexibility and nx higher chip density than conventional single-layer NEM memory switches.
- ISSN
- 0741-3106
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