Publications
Detailed Information
LTPS TFTs with an Amorphous Silicon Buffer Layer and Source/Drain Extension
Cited 7 time in
Web of Science
Cited 2 time in Scopus
- Authors
- Issue Date
- 2021
- Publisher
- MDPI AG
- Citation
- Electronics (Basel), Vol.10 No.1, p. 29
- Abstract
- A low leakage poly-Si thin film transistor (TFT) is proposed featuring hydrogenated amorphous silicon (a-Si:H) buffer layer and source/drain extension (SDE) by using technology computer aided design (TCAD) simulation. This architecture reduces off-current effectively by suppressing two leakage current generation mechanisms with little on-current loss. The amorphous silicon buffer layer having large bandgap energy (E-g) suppresses both thermal generation and minimum leakage current, which leads to higher on/off current ratio. In addition, the formation of lightly doped region near the drain alleviates the field-enhanced generation in the off-state by reducing electric field. TCAD simulation results show that the proposed TFT shows more than three orders of magnitude lower off-current than low-temperature polycrystalline silicon (LTPS) TFTs, while maintaining on-current.
- ISSN
- 2079-9292
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.