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질소이온주입된 실리콘 기판 위에 성장한 게이트 산화막에 관한 연구 : Ultra-thin gate oxide grown on nitrogen implanted silicon
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- Authors
- Advisor
- 이종덕
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(박사)--서울대학교 대학원 :전기공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063452
https://hdl.handle.net/10371/30856
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