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나노임프린트 리소그래피 충전 공정의 가압력 해석과 버블 결함 생성 조건 : Analysis of the mold pressure and the conditions of bubble defect formation in the filling process of nanoimprint lithography
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- Authors
- Advisor
- 신효철
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 나노임프린트 리소그래피 ; Nanoimprint lithography ; 벽면 미끄러짐 ; Wall slip ; 접촉각 ; Contact angle ; 버블 ; Bubble ; 몰드 ; Mold
- Description
- 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2009.8.
- Language
- Korean
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