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Ti gettering을 이용한 MEMS Resonator의 진공도에 대한 고찰 : (A) Study of the Vacuum Level for the MEMS Resonator using Ti Gettering
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- Authors
- Advisor
- 조동일
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- Micro Electro Mechanical System(MEMS) ; Micro Electro Mechanical System (MEMS) ; 진공도 ; Ti getter ; Ti getter ; Vacuum package ; 진공 실장
- Description
- 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2009.8.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038739
https://hdl.handle.net/10371/44680
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