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Design and synthesis of polysilsesquioxanes with low dielectric and photosensitive characteristics : 저유전 및 광민감 특성을 지닌 폴리실세스퀴옥산 고분자의 설계 및 합성
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- Authors
- Advisor
- 차국헌
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 폴리실세스퀴옥산 ; Polysilsesquioxane ; 저유전 박막 ; low-k thin film ; 아다만탄 ; adamantine ; 기공형성제 ; porogen ; 유전상수 ; dielectric constant ; 모듈러스 ; modulus ; 광패턴 ; photo-patterning ; 광분해 ; photo-decomposition ; 광산화 ; photo-oxidation ; 박막밀도 ; film density
- Description
- Thesis(doctor`s)--서울대학교 대학원 :응용화학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052304
https://hdl.handle.net/10371/45344
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