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진공실장된 MEMS 진동형 각속도계의 공진주파수와 Q factor 튜닝에 관한 연구
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- Authors
- Advisor
- 전국진
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS ; Mems ; 진동형 각속도계 ; Vibratory gyroscopes ; Q factor ; Q factor ; 정전력 피드백 ; Electrostatic feedback
- Description
- 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000053602
https://hdl.handle.net/10371/48342
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